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3D Optical Profiler (White Light Interferometer)

Brief description:A white light interferometer is an optical instrument that uses the principle of interference to measure the difference in optical path and thereby determine related physical quantities. Any change in the optical path difference between two coherent beams can very sensitively cause the interference fringes to move, and the change in the optical path of one coherent beam is caused by changes in the geometric path it travels or the refractive index of the medium. So by observing the movement of the interference fringes, tiny changes in geometric length or refractive index can be measured, allowing other related physical quantities to be determined. The measurement accuracy depends on

Industry Applications:Characterization of material surface morphology and roughness measurement.

Detailed

白光干涉仪是利用干涉原理测量光程之差从而测定有关物理量的光学仪器。两束相干光间光程差的任何变化会非常灵敏地导致干涉条纹的移动,而某一束相干光的光程变化是由它所通过的几何路程或介质折射率的变化引起,所以通过干涉条纹的移动变化可测量几何长度或折射率的微小改变量,从而测得与此有关的其他物理量。测量精度决定于测量光程差的精度,干涉条纹每移动一个条纹间距,光程差就改变一个波长(~10-7米),所以干涉仪是以光波波长为单位测量光程差的,其测量精度之高是任何其他测量方法所无法比拟的。


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